Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes

Aniello Esposito, Mauro Ciappa, Wolfgang Fichtner. Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes. Microelectronics Reliability, 51(9-11):1673-1678, 2011. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.