Motion Control of Piezo-Driven Stage via a Chattering-Free Sliding Mode Controller with Hysteresis Compensation

Yunfeng Fan, Yichang He, Dingguo Zhang, U-Xuan Tan. Motion Control of Piezo-Driven Stage via a Chattering-Free Sliding Mode Controller with Hysteresis Compensation. In 2018 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2018, Madrid, Spain, October 1-5, 2018. pages 6424-6430, IEEE, 2018. [doi]

Abstract

Abstract is missing.