Interface engineering of ferroelectric negative capacitance FET for hysteresis-free switch and reliability improvement

Chia-Chi Fan, Chun-Yuan Tu, Ming-Huei Lin, Chun-Yen Chang, Chun-Hu Cheng, Yen-Liang Chen, Guan-Lin Liou, Chien Liu, Wu-Ching Chou, Hsiao-Hsuan Hsu. Interface engineering of ferroelectric negative capacitance FET for hysteresis-free switch and reliability improvement. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 8-1, IEEE, 2018. [doi]

Abstract

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