Shao-Yun Fang, Wei-Yu Chen, Yao-Wen Chang. Graph-based subfield scheduling for electron-beam photomask fabrication. In Jiang Hu, Cheng-Kok Koh, editors, International Symposium on Physical Design, ISPD'12, Napa, CA, USA, March 25-28, 2012. pages 9-16, ACM, 2012. [doi]
Abstract is missing.