Shao-Yun Fang, Chung-Wei Lin, Guang-Wan Liao, Yao-Wen Chang. Simultaneous OPC- and CMP-aware routing based on accurate closed-form modeling. In Cheng-Kok Koh, Cliff C. N. Sze, editors, International Symposium on Physical Design, ISPD'13, Stateline, NV, USA, March 24-27, 2013. pages 77-84, ACM, 2013. [doi]
Abstract is missing.