Split-gate trench metal-oxide-semiconductor field effect transistor with an inverted L-shaped source region

Dong Fang, Guang Yang, Ming Qiao, Kui Xiao, Xiangyu Yang, Zheng Bian, Bo Zhang. Split-gate trench metal-oxide-semiconductor field effect transistor with an inverted L-shaped source region. Microelectronics Journal, 130:105616, 2022. [doi]

@article{FangYQXYBZ22,
  title = {Split-gate trench metal-oxide-semiconductor field effect transistor with an inverted L-shaped source region},
  author = {Dong Fang and Guang Yang and Ming Qiao and Kui Xiao and Xiangyu Yang and Zheng Bian and Bo Zhang},
  year = {2022},
  doi = {10.1016/j.mejo.2022.105616},
  url = {https://doi.org/10.1016/j.mejo.2022.105616},
  researchr = {https://researchr.org/publication/FangYQXYBZ22},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Journal},
  volume = {130},
  pages = {105616},
}