Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope

Sergej Fatikow, Thomas Wich, Helge Hülsen, Torsten Sievers, Marco Jähnisch. Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope. In Proceedings of the 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, May 15-19, 2006, Orlando, Florida, USA. pages 1402-1407, IEEE, 2006.

Abstract

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