Effect of Frequency on Reliability Of High-K MIM Capacitors

X. Federspiel, A. Griffon, M. Barlas, P. Lamontagne. Effect of Frequency on Reliability Of High-K MIM Capacitors. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-6, IEEE, 2023. [doi]

Abstract

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