R. Fedosejevs, M. Argument, A. Sardarli, S. E. Kirkwood, Robert Holenstein, Ying Y. Tsui. Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 53, IEEE Computer Society, 2003. [doi]
@inproceedings{FedosejevsASKHT03,
title = {Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications},
author = {R. Fedosejevs and M. Argument and A. Sardarli and S. E. Kirkwood and Robert Holenstein and Ying Y. Tsui},
year = {2003},
url = {http://csdl.computer.org/comp/proceedings/icmens/2003/1947/00/19470053.pdf},
researchr = {https://researchr.org/publication/FedosejevsASKHT03},
cites = {0},
citedby = {0},
pages = {53},
booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada},
publisher = {IEEE Computer Society},
isbn = {0-7695-1947-4},
}