Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications

R. Fedosejevs, M. Argument, A. Sardarli, S. E. Kirkwood, Robert Holenstein, Ying Y. Tsui. Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 53, IEEE Computer Society, 2003. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.