R. Fedosejevs, M. Argument, A. Sardarli, S. E. Kirkwood, Robert Holenstein, Ying Y. Tsui. Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 53, IEEE Computer Society, 2003. [doi]
Abstract is missing.