Data-Driven Feedforward Decoupling Filter Design for Parallel Nanopositioning Stages

Zhao Feng, Jie Ling, Min Ming, Xiaohui Xiao. Data-Driven Feedforward Decoupling Filter Design for Parallel Nanopositioning Stages. In Naoyuki Kubota, Kazuo Kiguchi, Honghai Liu, Takenori Obo, editors, Intelligent Robotics and Applications - 9th International Conference, ICIRA 2016, Tokyo, Japan, August 22-24, 2016, Proceedings, Part I. Volume 9834 of Lecture Notes in Computer Science, pages 709-720, Springer, 2016. [doi]

Abstract

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