Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill

Chunyang Feng, Hai Zhou, Changhao Yan, Jun Tao, Xuan Zeng. Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill. IEEE Trans. on CAD of Integrated Circuits and Systems, 30(3):402-415, 2011. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.