Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill

Chunyang Feng, Hai Zhou, Changhao Yan, Jun Tao, Xuan Zeng. Efficient Approximation Algorithms for Chemical Mechanical Polishing Dummy Fill. IEEE Trans. on CAD of Integrated Circuits and Systems, 30(3):402-415, 2011. [doi]

Abstract

Abstract is missing.