Guidelines for intermediate back end of line (BEOL) for 3D sequential integration - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Claire Fenouillet-Béranger, S. Beaurepaire, Fabien Deprat, Alexandre Ayres De Sousa, Laurent Brunet, Perrine Batude, Olivier Rozeau, François Andrieu, Paul Besombes, M.-P. Samson, Bernard Previtali, F. Nemouchi, G. Rodriguez, P. Rodriguez, R. Famulok, Nils Rambal, V. Balan, Z. Saghi, V. Jousseaume, Charles-Antoine Guérin, F. Ibars, F. Proud, D. Nouguier, D. Ney, V. Delaye, H. Dansas, X. Federspiel, Maud Vinet. Guidelines for intermediate back end of line (BEOL) for 3D sequential integration. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 252-255, IEEE, 2017. [doi]

This author has not been identified. Look up 'Claire Fenouillet-Béranger' in GoogleThis author has not been identified. Look up 'S. Beaurepaire' in GoogleThis author has not been identified. Look up 'Fabien Deprat' in GoogleThis author has not been identified. Look up 'Alexandre Ayres De Sousa' in GoogleThis author has not been identified. Look up 'Laurent Brunet' in GoogleThis author has not been identified. Look up 'Perrine Batude' in GoogleThis author has not been identified. Look up 'Olivier Rozeau' in GoogleThis author has not been identified. Look up 'François Andrieu' in GoogleThis author has not been identified. Look up 'Paul Besombes' in GoogleThis author has not been identified. Look up 'M.-P. Samson' in GoogleThis author has not been identified. Look up 'Bernard Previtali' in GoogleThis author has not been identified. Look up 'F. Nemouchi' in GoogleThis author has not been identified. Look up 'G. Rodriguez' in GoogleThis author has not been identified. Look up 'P. Rodriguez' in GoogleThis author has not been identified. Look up 'R. Famulok' in GoogleThis author has not been identified. Look up 'Nils Rambal' in GoogleThis author has not been identified. Look up 'V. Balan' in GoogleThis author has not been identified. Look up 'Z. Saghi' in GoogleThis author has not been identified. Look up 'V. Jousseaume' in GoogleThis author has not been identified. Look up 'Charles-Antoine Guérin' in GoogleThis author has not been identified. Look up 'F. Ibars' in GoogleThis author has not been identified. Look up 'F. Proud' in GoogleThis author has not been identified. Look up 'D. Nouguier' in GoogleThis author has not been identified. Look up 'D. Ney' in GoogleThis author has not been identified. Look up 'V. Delaye' in GoogleThis author has not been identified. Look up 'H. Dansas' in GoogleThis author has not been identified. Look up 'X. Federspiel' in GoogleThis author has not been identified. Look up 'Maud Vinet' in Google

runs on WebDSL