A new robust damping and tracking controller for SPM positioning stages

Andrew J. Fleming, Sumeet S. Aphale, S. O. Reza Moheimani. A new robust damping and tracking controller for SPM positioning stages. In American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009. pages 289-294, IEEE, 2009. [doi]

Abstract

Abstract is missing.