From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration

Karine Florent, Simone Lavizzari, Luca Di Piazza, Mihaela Popovici, Goedele Potoms, Tom Raymaekers, Guido Groeseneken, Jan Van Houdt. From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 164-167, IEEE, 2017. [doi]

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