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An AlN Micromachined Mass Sensor: Modeling and Characterization

Ada Fort, Carlo Trigona, Enza Panzardi, Valerio Vignoli, Tommaso Addabbo, Marco Mugnaini. An AlN Micromachined Mass Sensor: Modeling and Characterization. IEEE T. Instrumentation and Measurement, 70:1-13, 2021. [doi]

Authors

Ada Fort

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Carlo Trigona

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Enza Panzardi

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Valerio Vignoli

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Tommaso Addabbo

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Marco Mugnaini

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