An AlN Micromachined Mass Sensor: Modeling and Characterization

Ada Fort, Carlo Trigona, Enza Panzardi, Valerio Vignoli, Tommaso Addabbo, Marco Mugnaini. An AlN Micromachined Mass Sensor: Modeling and Characterization. IEEE T. Instrumentation and Measurement, 70:1-13, 2021. [doi]

@article{FortTPVAM21,
  title = {An AlN Micromachined Mass Sensor: Modeling and Characterization},
  author = {Ada Fort and Carlo Trigona and Enza Panzardi and Valerio Vignoli and Tommaso Addabbo and Marco Mugnaini},
  year = {2021},
  doi = {10.1109/TIM.2020.3008987},
  url = {https://doi.org/10.1109/TIM.2020.3008987},
  researchr = {https://researchr.org/publication/FortTPVAM21},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {70},
  pages = {1-13},
}