An AlN Micromachined Mass Sensor: Modeling and Characterization

Ada Fort, Carlo Trigona, Enza Panzardi, Valerio Vignoli, Tommaso Addabbo, Marco Mugnaini. An AlN Micromachined Mass Sensor: Modeling and Characterization. IEEE T. Instrumentation and Measurement, 70:1-13, 2021. [doi]

Abstract

Abstract is missing.