Yilei Fu, Zhisheng Zhang, Zhijie Xia, Haiying Wen, Min Dai, Hui Zhang. Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network. In 29th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2023, Queenstown, New Zealand, November 21-24, 2023. pages 1-6, IEEE, 2023. [doi]
@inproceedings{FuZXWDZ23,
title = {Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network},
author = {Yilei Fu and Zhisheng Zhang and Zhijie Xia and Haiying Wen and Min Dai and Hui Zhang},
year = {2023},
doi = {10.1109/M2VIP58386.2023.10413390},
url = {https://doi.org/10.1109/M2VIP58386.2023.10413390},
researchr = {https://researchr.org/publication/FuZXWDZ23},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {29th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2023, Queenstown, New Zealand, November 21-24, 2023},
publisher = {IEEE},
isbn = {979-8-3503-2562-1},
}