Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network - researchr publication

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Yilei Fu, Zhisheng Zhang, Zhijie Xia, Haiying Wen, Min Dai, Hui Zhang. Quality Prediction of PECVD Process with Random Forest and Long Short-Term Memory Neural Network. In 29th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2023, Queenstown, New Zealand, November 21-24, 2023. pages 1-6, IEEE, 2023. [doi]

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