Itsuki Fujita, Yoshikazu Nagamura, Masayuki Arai, Satoshi Fukumoto. Note on CapsNet-Based Wafer Map Defect Pattern Classification. In 30th IEEE Asian Test Symposium, ATS 2021, Matsuyama, Ehime, Japan, November 22-25, 2021. pages 37-42, IEEE, 2021. [doi]
Abstract is missing.