System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table

Rong-Fong Fung, Wang-Chi Lin. System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table. IEEE Trans. Contr. Sys. Techn., 18(1):22-34, 2010. [doi]

Authors

Rong-Fong Fung

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Wang-Chi Lin

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