System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table

Rong-Fong Fung, Wang-Chi Lin. System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table. IEEE Trans. Contr. Sys. Techn., 18(1):22-34, 2010. [doi]

@article{FungL10,
  title = {System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table},
  author = {Rong-Fong Fung and Wang-Chi Lin},
  year = {2010},
  doi = {10.1109/TCST.2008.2009528},
  url = {http://dx.doi.org/10.1109/TCST.2008.2009528},
  researchr = {https://researchr.org/publication/FungL10},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. Contr. Sys. Techn.},
  volume = {18},
  number = {1},
  pages = {22-34},
}