System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table

Rong-Fong Fung, Wang-Chi Lin. System Identification and Contour Tracking of a Plane-Type 3-DOF (X, Y, Theta z) Precision Positioning Table. IEEE Trans. Contr. Sys. Techn., 18(1):22-34, 2010. [doi]

Abstract

Abstract is missing.