A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques - researchr publication authors

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Yuki Furubayashi, Takashi Oshima, Taizo Yamawaki, Keiki Watanabe, Keijiro Mori, Naoki Mori, Akira Matsumoto, Yudai Kamada, Atsushi Isobe, Tomonori Sekiguchi. A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques. J. Solid-State Circuits, 55(9):2539-2552, 2020. [doi]

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