Atomic configuration of boron pile-up at the Si/SiO2 interface

Masayuki Furuhashi, Tetsuya Hirose, Hiroshi Tsuji, Masayuki Tachi, Kenji Taniguchi. Atomic configuration of boron pile-up at the Si/SiO2 interface. IEICE Electronic Express, 1(6):126-130, 2004. [doi]

Authors

Masayuki Furuhashi

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Tetsuya Hirose

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Hiroshi Tsuji

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Masayuki Tachi

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Kenji Taniguchi

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