Atomic configuration of boron pile-up at the Si/SiO2 interface

Masayuki Furuhashi, Tetsuya Hirose, Hiroshi Tsuji, Masayuki Tachi, Kenji Taniguchi. Atomic configuration of boron pile-up at the Si/SiO2 interface. IEICE Electronic Express, 1(6):126-130, 2004. [doi]

Abstract

Abstract is missing.