Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan. MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction. In The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014. pages 1-6, ACM, 2014. [doi]
@inproceedings{GaoXYP14, title = {MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction}, author = {Jhih-Rong Gao and Xiaoqing Xu and Bei Yu and David Z. Pan}, year = {2014}, doi = {10.1145/2593069.2593163}, url = {http://doi.acm.org/10.1145/2593069.2593163}, researchr = {https://researchr.org/publication/GaoXYP14}, cites = {0}, citedby = {0}, pages = {1-6}, booktitle = {The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014}, publisher = {ACM}, isbn = {978-1-4503-2730-5}, }