Jhih-Rong Gao, Xiaoqing Xu, Bei Yu, David Z. Pan. MOSAIC: Mask Optimizing Solution With Process Window Aware Inverse Correction. In The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014. pages 1-6, ACM, 2014. [doi]
Abstract is missing.