A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams

Lili Gao, Zai-Fa Zhou, Qing-An Huang. A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams. Sensors, 17(11):2561, 2017. [doi]

Authors

Lili Gao

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Zai-Fa Zhou

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Qing-An Huang

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