Lili Gao, Zai-Fa Zhou, Qing-An Huang. A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams. Sensors, 17(11):2561, 2017. [doi]
@article{GaoZH17,
title = {A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams},
author = {Lili Gao and Zai-Fa Zhou and Qing-An Huang},
year = {2017},
doi = {10.3390/s17112561},
url = {https://doi.org/10.3390/s17112561},
researchr = {https://researchr.org/publication/GaoZH17},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {17},
number = {11},
pages = {2561},
}