A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams

Lili Gao, Zai-Fa Zhou, Qing-An Huang. A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams. Sensors, 17(11):2561, 2017. [doi]

Abstract

Abstract is missing.