A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET)

Wendi Gao, Libo Zhao, Zhuangde Jiang, Yong Xia, Xin Guo, Zhiming Zhao, Yulong Zhao, Dong Sun. A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET). In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 723-727, IEEE, 2017. [doi]

Authors

Wendi Gao

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Libo Zhao

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Zhuangde Jiang

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Yong Xia

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Xin Guo

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Zhiming Zhao

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Yulong Zhao

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Dong Sun

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