A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET)

Wendi Gao, Libo Zhao, Zhuangde Jiang, Yong Xia, Xin Guo, Zhiming Zhao, Yulong Zhao, Dong Sun. A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET). In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 723-727, IEEE, 2017. [doi]

@inproceedings{GaoZJXGZZS17,
  title = {A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET)},
  author = {Wendi Gao and Libo Zhao and Zhuangde Jiang and Yong Xia and Xin Guo and Zhiming Zhao and Yulong Zhao and Dong Sun},
  year = {2017},
  doi = {10.1109/NEMS.2017.8017122},
  url = {https://doi.org/10.1109/NEMS.2017.8017122},
  researchr = {https://researchr.org/publication/GaoZJXGZZS17},
  cites = {0},
  citedby = {0},
  pages = {723-727},
  booktitle = {12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-3059-0},
}