A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET)

Wendi Gao, Libo Zhao, Zhuangde Jiang, Yong Xia, Xin Guo, Zhiming Zhao, Yulong Zhao, Dong Sun. A novel MEMS force sensor based on Laterally Movable Gate Array Field Effect Transistor(LMGAFET). In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 723-727, IEEE, 2017. [doi]

Abstract

Abstract is missing.