Steven L. Garverick, Michael L. Nagy, Michael J. Kane, Jun Guo. Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays. In Proceedings of the IEEE Custom Integrated Circuits Conference, CICC 2003, San Jose, CA, USA, September 21 - 24, 2003. pages 481-484, IEEE, 2003. [doi]
@inproceedings{GarverickNKG03,
title = {Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays},
author = {Steven L. Garverick and Michael L. Nagy and Michael J. Kane and Jun Guo},
year = {2003},
doi = {10.1109/CICC.2003.1249445},
url = {https://doi.org/10.1109/CICC.2003.1249445},
researchr = {https://researchr.org/publication/GarverickNKG03},
cites = {0},
citedby = {0},
pages = {481-484},
booktitle = {Proceedings of the IEEE Custom Integrated Circuits Conference, CICC 2003, San Jose, CA, USA, September 21 - 24, 2003},
publisher = {IEEE},
isbn = {0-7803-7842-3},
}