Steven L. Garverick, Michael L. Nagy, Michael J. Kane, Jun Guo. Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays. In Proceedings of the IEEE Custom Integrated Circuits Conference, CICC 2003, San Jose, CA, USA, September 21 - 24, 2003. pages 481-484, IEEE, 2003. [doi]
Abstract is missing.