Giorgio Gattiker, Karan V. I. S. Kaler, Martin P. Mintchev. Microactuation of suspended MEMS beams. In International Symposium on Circuits and Systems (ISCAS 2005), 23-26 May 2005, Kobe, Japan. pages 2755-2758, IEEE, 2005. [doi]
@inproceedings{GattikerKM05,
title = {Microactuation of suspended MEMS beams},
author = {Giorgio Gattiker and Karan V. I. S. Kaler and Martin P. Mintchev},
year = {2005},
doi = {10.1109/ISCAS.2005.1465197},
url = {http://dx.doi.org/10.1109/ISCAS.2005.1465197},
researchr = {https://researchr.org/publication/GattikerKM05},
cites = {0},
citedby = {0},
pages = {2755-2758},
booktitle = {International Symposium on Circuits and Systems (ISCAS 2005), 23-26 May 2005, Kobe, Japan},
publisher = {IEEE},
}