Microactuation of suspended MEMS beams

Giorgio Gattiker, Karan V. I. S. Kaler, Martin P. Mintchev. Microactuation of suspended MEMS beams. In International Symposium on Circuits and Systems (ISCAS 2005), 23-26 May 2005, Kobe, Japan. pages 2755-2758, IEEE, 2005. [doi]

Abstract

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