Wei-Hsin Gau, Shin-Chun Huang, Yuh-Chung Hu. Fabrication and vibration analysis of micro-cross beams. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 211-214, IEEE, 2009. [doi]
@inproceedings{GauHH09-0,
title = {Fabrication and vibration analysis of micro-cross beams},
author = {Wei-Hsin Gau and Shin-Chun Huang and Yuh-Chung Hu},
year = {2009},
doi = {10.1109/NEMS.2009.5068561},
url = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068561},
tags = {analysis},
researchr = {https://researchr.org/publication/GauHH09-0},
cites = {0},
citedby = {0},
pages = {211-214},
booktitle = {4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009},
publisher = {IEEE},
isbn = {978-1-4244-4629-2},
}