Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers - researchr publication authors

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Khashayar Babaei Gavan, Joost van der Heijden, Emile W. J. M. van der Drift, Herre S. J. van der Zant. Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 380-384, IEEE, 2009. [doi]

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