Single-chip surface micromachined integrated gyroscope with 50/spl deg//h Allan deviation

John A. Geen, Steven J. Sherman, John F. Chang, Stephen R. Lewis. Single-chip surface micromachined integrated gyroscope with 50/spl deg//h Allan deviation. J. Solid-State Circuits, 37(12):1860-1866, 2002. [doi]

Abstract

Abstract is missing.