Regularized level-set-based inverse lithography algorithm for IC mask synthesis

Zhen Geng, Zheng Shi, Xiaolang Yan, Kai-sheng Luo. Regularized level-set-based inverse lithography algorithm for IC mask synthesis. Journal of Zhejiang University - Science C, 14(10):799-807, 2013. [doi]

Authors

Zhen Geng

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Zheng Shi

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Xiaolang Yan

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Kai-sheng Luo

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