Zhen Geng, Zheng Shi, Xiaolang Yan, Kai-sheng Luo. Regularized level-set-based inverse lithography algorithm for IC mask synthesis. Journal of Zhejiang University - Science C, 14(10):799-807, 2013. [doi]
@article{GengSYL13,
title = {Regularized level-set-based inverse lithography algorithm for IC mask synthesis},
author = {Zhen Geng and Zheng Shi and Xiaolang Yan and Kai-sheng Luo},
year = {2013},
doi = {10.1631/jzus.C1300050},
url = {http://dx.doi.org/10.1631/jzus.C1300050},
researchr = {https://researchr.org/publication/GengSYL13},
cites = {0},
citedby = {0},
journal = {Journal of Zhejiang University - Science C},
volume = {14},
number = {10},
pages = {799-807},
}