External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Regularized level-set-based inverse lithography algorithm for IC mask synthesis

Zhen Geng, Zheng Shi, Xiaolang Yan, Kai-sheng Luo. Regularized level-set-based inverse lithography algorithm for IC mask synthesis. Journal of Zhejiang University - Science C, 14(10):799-807, 2013. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.

runs on