Rani S. Ghaida, Tanaya Sahu, Parag Kulkarni, Puneet Gupta. A methodology for the early exploration of design rules for multiple-patterning technologies. In 2012 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2012, San Jose, CA, USA, November 5-8, 2012. pages 50-56, IEEE, 2012. [doi]
Abstract is missing.