Anomalous gate oxide conduction on isolation edges: analysis and process optimization

A. Ghetti, D. Brazzelli, A. Benvenuti, G. Ghidini, A. Pavan. Anomalous gate oxide conduction on isolation edges: analysis and process optimization. Microelectronics Reliability, 43(8):1229-1235, 2003. [doi]

Abstract

Abstract is missing.