Gabriella Ghidini, Daniele Merlini, Massimiliano Cannavo, Maria Luisa Polignano, Isabella Mica, Amos Galbiati, Lucia Zullino, Riccardo Turconi, Salvatore Grasso, Maurizio Moroni, Davide Codegoni. H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks. In 45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015. pages 294-297, IEEE, 2015. [doi]
@inproceedings{GhidiniMCPMGZTG15,
title = {H2 annealing for metallic contaminant reduction in BCD-SOI process: Benefits and drawbacks},
author = {Gabriella Ghidini and Daniele Merlini and Massimiliano Cannavo and Maria Luisa Polignano and Isabella Mica and Amos Galbiati and Lucia Zullino and Riccardo Turconi and Salvatore Grasso and Maurizio Moroni and Davide Codegoni},
year = {2015},
doi = {10.1109/ESSDERC.2015.7324772},
url = {http://dx.doi.org/10.1109/ESSDERC.2015.7324772},
researchr = {https://researchr.org/publication/GhidiniMCPMGZTG15},
cites = {0},
citedby = {0},
pages = {294-297},
booktitle = {45th European Solid State Device Research Conference, ESSDERC 2015, Graz, Austria, September 14-18, 2015},
publisher = {IEEE},
isbn = {978-1-4673-7135-3},
}